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SPECS - Systems

Specialized & Customized Systems for Surface Analysis

SPECS is specialized in the development and production of customized UHV surface analysis systems

Following the customer's vision,  SPECS conceives, designs, and produces individual systems to meet the customer's needs.

Moreover, SPECS offers compact solutions like the ESCA system SAGE and the SNMS system INA-X for the control of wafer surface composition, depth profiling of chemical concentrations, and polymer surface composition checks.

For the development and construction of these highly customized research systems SPECS closely cooperates with partner companies within the Network of Competence.



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