This evaporation guide represents a survey of commonly used elements and their physical properties determining their evaporation behaviour. Although in the preparation of this guide every effort has been made to ensure accuracy, completeness and clarity, it cannot be guaranteed that no errors exist. Therefore use this information only as a general guide. In any case, please verify important data relevant to your experiment. 

Some materials and their compounds are extremely toxic and must be handled with great care. Manufacturers' safety and handling instructions must be strictly followed!

The table which is listed below describes different materials (mainly element species), recommended effusion cell types, crucible material to be used, melting point (MP) and dedicated vapor pressure data within the UHV and HV regime.

Material	Symbol	Recommended  source type	Crucible material	MP	Temperature (°C) for vapour pressure (Torr)
				(°C)	10-8	10-6	10-4
Aluminium	Al	Cold Lip Effusion Cell	PBN	660	685	812	972
Antimony	Sb	Valved Cracker, Cracker or Low Temp Effusion Cell	PBN	631	279	345	425
Argon	Ar	ECR Plasma Source	Alumina	...	...	...	...
Arsenic	As	Valved Cracker, Cracker , Valved or Low Temp Effusion Cell	PBN	817	104	150	210
Barium	Ba	Low Temp Effusion Cell	Ta, Mo	727	272	354	462
Beryllium	Be	High Temp Effusion Cell	BeO, VC	1287	707	832	997
BioMaterials	...	Near Ambient Effusion Cell	Quartz, PBN, Ta, PGR	...	...	...	...
Bismuth	Bi	Low Temp Effusion Cell	Al2O3, BeO, VC	271	329	409	517
Boron	B	High Temp Effusion Cell	C, VC	2075	1282	1467	1707
Cadmium	Cd	Low Temp Effusion Cell	Al2O3, Quartz, PBN	321	74	119	177
Calcium	Ca	Low Temp Effusion Cell	Al2O3, Quartz, PBN	842	282	357	459
Carbon	C	Carbon Effusion Cell	PGR	3550	1657	1867	2136
Cerium	Ce	High Temp Effusion Cell	Al2O3, BeO, VC	795	970	1150	1380
Cesium	Cs	Near Ambient or LowTemp Effusion Cell	Quartz, PBN	29	-16	22	80
Chlorine	Cl	ECR Plasma Source	Al2O3	...	...	...	...
Chromium	Cr	High Temp Effusion Cell	VC	1907	837	977	1157
Cobalt	Co	High Temp Effusion Cell	Al2O3, BeO	1495	922	1067	1257
Copper	Cu	Single Filament or HighTemp Effusion Cell	Al2O3, Mo, Ta, BeO	1085	722	852	1027
Dysprosium	Dy	High Temp Effusion Cell	Ta	1412	625	750	900
Erbium	Er	Dual Filament or SingleFilament Cell	PBN, Ta, W	1529	649	777	897
Europium	Eu	Low Temp Effusion Cell , Dual Filament Cell	Al2O3, Mo, Ta, PBN	822	283	361	466
Gallium	Ga	Dual Filament or Single Filament Effusion Cell	PBN, Al2O3, BeO, Quartz	30	619	742	907
Germanium	Ge	Dual Filament or Single Filament Effusion Cell	PBN, Al2O3, Quartz	938	812	947	1137
Gold	Au	Single Filament or High Temp Effusion Cell	Al2O3, PBN, VC,	1064	807	947	1132
Hydrogen	H	Thermal Gas Cracker / ECR Plasma Source RF Plasma Source	...	...	...	...	...
Indium	In	Dual Filament Effusion Cell	Al2O3, PBN	157	488	597	742
Iridium	Ir	E-Beam Evaporator	...	2410	1850	2080	2380
Iron	Fe	E-Beam Evaporator, High Temp Effusion Cell	Al2O3, BeO	1538	858	998	1180
Lanthanum	La	High Temp Effusion Cell	Al2O3	920	990	1212	1388
Lithium	Li	Low Temp Effusion Cell	Al2O3, BeO, PBN	180	235	306	404
Lutetium	Lu	High Temp Effusion Cell	Al2O3	1663	870	1228	1376
Magnesium	Mg	Low Temp Effusion Cell	Al2O3, VC, PBN	650	185	246	327
Manganese	Mn	Single Filament Effusion Cell	Al2O3, BeO	1246	505	611	747
Mercury	Hg	Near Ambient Effusion Cell	Al2O3, Quartz, PBN	-39	72	-44	7
Methane	CH4	ECR Plasma Source	...	...	...	...	...
Molybdenum	Mo	E-Beam Evaporator	...	2610	1592	1822	2117
Nickel	Ni	High Temp Effusion Cell	Al2O3, BeO,VC	1455	927	1072	1262
Niobium	Nb	E-Beam Evaporator	...	2468	1728	1977	2287
Nitrogen	N	RF Plasma Source	PBN	...	...	...	...
Organics	...	Near Ambient Effusion Cell	Al2O3, Quartz, PBN	...	...	...	...
Oxygen	O	ECR Plasma Source	Alumina	...	...	...	...
Palladium	Pd	High Temp Effusion Cell	Al2O3, BeO	1555	842	992	1192
Phosphorus	P	Valved Cracker  or Valved Effusion Cell	Al2O3, PbN, Ta/Mo	44	54	88	192
Platinum	Pt	E-Beam Evaporator, High Temp Effusion Cell	BeO	1768	1292	1492	1747
Polymers	...	Near Ambient Effusion Cell	Al2O3	...	...	...	...
Potassium	K	Low Temp Effusion Cell	Al2O3, Quartz, PBN	64	21	65	123
Rhenium	Re	E-Beam Evaporator	...	3180	1928	2207	2570
Rhodium	Rh	E-Beam Evaporator	...	1966	1277	1472	1707
Ruthenium	Ru	E-Beam Evaporator	...	2310	1780	1990	2260
Scandium	Sc	Dual Filament Effusion Cell , High Temp Effusion Cell	Al2O3, BeO	1541	772	917	1107
Selenium	Se	Valved Cracker, Cracker , or Low Temp Effusion Cell	PBN	221	63	107	164
Silicon	Si	E-Beam Evaporator	...	1414	992	1147	1337
Silver	Ag	Single Filament or High Temp Effusion Cell	Al2O3, Mo	962	574	685	832
Sodium	Na	Low Temp Effusion Cell	Quartz, PBN	98	74	123	193
Strontium	Sr	Low Temp Effusion Cell	VC, Mo	777	241	309	404
Sulfur	S	Valved Cracker , Cracker  or Valved Effusion Cell	PBN	115	-10	17	55
Tantalum	Ta	E-Beam Evaporator	...	2996	1960	2240	2590
Tellurium	Te	Valved Cracker Effusion Cell	PBN	450	155	209	280
Thallium	Tl	Low Temp Effusion Cell	Al2O3, Quartz	304	280	360	470
Thorium	Th	E-Beam Evaporator	W, Ta, Mo	1845	1430	1660	1925
Tin	Sn	Dual Filament , or Single Filament Effusion Cell	PBN	232	682	807	997
Titanium	Ti	E-Beam Evaporator	...	1660	1067	1235	1453
Tungsten	W	E-Beam Evaporator	...	3410	2117	2407	2757
Vanadium	V	High Temp Effusion Cell, E-Beam Evaporator	W, Mo	1910	1162	1332	1547
Ytterbium	Yb	Low Temp Effusion Cell	Ta	824	247	317	417
Yttrium	Y	High Temp Effusion Cell	Al2O3	1526	957	1117	1332
Zinc	Zn	Low Temp Effusion Cell	Al2O3, Quartz, PBN	420	123	177	247
Zirconium	Zr	E-Beam Evaporator	...	1852	1477	1702	1987

This guide was prepared by Edward Graper of Lebow Corporation and is being made available to assist SPECS GmbH customers. Neither Edward Graper nor Lebow Corporation guarantees the accuracy of this information or the results of its applications. This guide may not be reproduced in any way without written permission from Lebow Corporation, which will, however, usually be granted.

Some materials and their compounds are extremely toxic and must be handled with great care. Manufacturers safety and handling instructions must be strictly followed!

Neither Lebow Corporation nor SPECS GMBH accept responsibility for any misuse of materials or their evaporation and deposition applications.