• Fully computerized Surface Analysis
• Automatic quantification
• Nondestructive analysis
• Exact sample positioning and monitoring

• Small spot ion source for depth profiling
• Optical microscope for sample monitoring
• Flood Gun for charge compensation
• Fine focus electron source for AES and SEM/SAM
• UV-source for UPS
• X-Ray Monochromator
• Preparation chamber for surface processing

Applications:

• Determination of layer thickness for hard disc production
• Control of wafer surface composition between different processing steps
• Composition analysis of bioactive surface
• Depth profiling of chemical concentration profiles with nm resolution
• Polymer surface composition checks following technological treatment
• General quality control in microelectronic production lines
• Adhesion problems on surfaces

Product Description:
The SAGE is a compact system for demanding analysis and quality control applications. It provides fully automated qualitative and quantitative routine ESCA analysis.
It gives you detailed information on the surface chemistry and material properties of conducting and insulating samples. The SAGE system provides high precision quantitative information and fast data interpretation routines.

The SAGE ESCA System Family:
The proven automated ESCA concept SAGE is available with different analyzer configurations including the state-of-the-art hemispherical analyzer PHOIBOS with small area capability and a broad range of detector options.
For an overview and technical comparison please click here.