Features:
- Scannable electron source with a small spot profile
- Full digital control
- Integrated scan and deflection unit
- High current
- Beam diameter down to < 100µm
- Energy range 0-5keV
- Energy width ~ 0.6eV
- Max beam current up to 100µA
- Working distance 32mm
- Scan range 10mm x 10mm
Applications:
- AES
- Scanning applications (e.g. SAM)
- Imaging (e.g. SEM)
- EELS (e.g. low energy plasmon spectroscopy)
- Desorption experiments (ESD)
Product Description:
The EQ 22/35 is an electron source producing a focused, scannable, high current electron beam over a wide electron energy range. It is designed for stable and reliable operation in electron source applications including AES, scanning applications, imaging, EELS and electron pulse or desorption experiments. Due to the high transmission of its Einzel-Lens, the EQ 22/35 is an electron source which gives high electron beam currents over a wide energy range. The source can be adapted to suit customer requirements regarding the insertion depth, the source shielding material (µ-metal or copper) and the filament type (standard hair pin or microformed tip). |
