Features: High Transmission Resolution m/Δm > 20@5 keV Additional port for differential pumping Stigmatic correction and beam adjustment Bakeable up do 350° C Beam blanking Retrofitable to IQE 12/38 ion source

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Applications:
The Wien Mass Filter WF-IQE is used for SIMS and SNMS depth profiling analysis in combination with an ion source for producing a pure ion beam, free from neutral particles. In surface and thin film analysis systems it may be used as a primary ion source for

• Dynamic SIMS and SNMS analysis, meeting most exacting requirements
• Ion Scattering Spectroscopy (ISS)

Product Description:
For accurate depth profiling analysis the ion beam of an electron impact or plasma ion source must be of high purity and free from neutral particles. This is ensured by the Wien Mass Filter which eliminates ions of unwanted isotopes and impurities and multiplies charged ions as well as neutral particles.