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Electron Beam Evaporator EBE-1
- Evaporation zone completely enclosed in a cooled copper shroud which is cooled by stainless steel water pipes.
- Filament assembly constructed as an easily replaceable unit. User may replace just the filament using standard tungsten wire. Spare filament assemblies can be purchased or prepared in advance and can be quickly and easily replaced without disassembling the evaporator head.
- Even heat distribution through filament encircling the rod or crucible. Higher temperatures possible without local damage to crucibles.
- Long filament design allowing operation at lower temperatures with a consequent improvement in filament lifetime.
- Power supply with intelligent front plate for control of filament current or flux.
- Simple, rugged and modular power supply design.
- Power supply generates enough power to evaporate the thickest rods (6 mm) and is also robust enough to survive misuse without the dire consequences seen in more complex failure-prone electronics.
- Pt: Thin films, surface science. From rod/crucible.
- Cr: Metalising, contacting. From rod - sublimes.
- Al2O3: Optical films, oxide films. From crucible.
- C: Doping, SEM sample preparation. From rod.
- Au, Ag: Metalising, contacting. From crucible.
- Cu: Surface science. From crucible.
- Nb: From rod.
The SPECS EBE-1 is a combined mini e-beam evaporator and e-beam heated effusion cell and is capable of evaporating small quantities of almost any material. The material either in rod form, or in a crucible, is heated by electron bombardment from the surrounding filament. The capacity for electrons to be directed to deliver their energy in a confined area, leads to extremely high power densities and local heating, allowing temperatures in excess of 3000 K to be reached.
EBE-1 product brochure
To all customers of
former Oxford Scientific Ltd.:
SPECS has taken over
the product line of deposition
sources from Oxford Scientific
in 2006, with Dr. Christian Bradley
still involved in the further
development of the sources.
For more information contact us