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Plasma Cracker Source PCS-ECR
Plasma source, atom source or ion source
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- Filamentless design
The absence of a hot filament to create the plasma, permits operation with most gases including reactive gases such as oxygen, chlorine, nitrogen and hydrogen.
- No microwave tuning required
Simply turn the plasma on and off.
- Unique integrated shutter and current monitor option
Allows beam density and residual current measurements to be made while the beam is shut off.
- Trivial bakeout preparation ~1minute
Remove only the microwave generator and cables (no water-jacket disassembly).
- Built in microwave generator/tuner
Eliminates the need for waveguide installation. The sophisticated microwave tuner allows tuning to be optimized for each mode for maximum performance.
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Suitable for use in vacuum levels ranging from HV to those found in the most demanding MBE applications. The PCS-ECR can be used as plasma source, atom source or ion source.
The SPECS PCS-ECR source is a truly UHV compatible Plasma source for the generation of atoms and ions (see also the SPECS Ion Sources IQE 12/38, IQE 11/35, IQP 10/63). It is fully bakeable, with an all-welded stainless steel vacuum envelope, and outstanding cooling from a full length water-jacket. Through the action of the well-known electron cyclotron resonance (ECR) phenomenon, a high density plasma is created by coupling a radially symmetric 2.45GHz microwave field to ions on the 86mT surface of a multi-polar magnetic array.
A unique combination of features and options make this an extraordinarily versatile plasma source.
PCS-ECR product brochure
To all customers of
former Oxford Scientific Ltd.:
SPECS has taken over
the product line of deposition
sources from Oxford Scientific
in 2006, with Dr. Christian Bradley
still involved in the further
development of the sources.
For more information contact us