Multi Pocket Electron Beam Evaporator EBE-4

Features:

Mounting flange: 2.75" (NW35CF)
With four individual pockets
With internal water-cooling
In vacuum length: 210 mm
In vacuum diameter: 34 mm
Bakeout temperature: 200° C
Max. rod diameter 4 mm
Up to 25 mm rod feed
Crucible size 0.07 cc
Operating Pressure: < 10^-10 - 10^-5 mbar
Power supply with controller: 300 W

Applications:

Pt: Thin films, surface science. From rod/crucible.
Cr: Metalising, contacting. From rod - sublimes.
Al₂O₃: Optical films, oxide films. From crucible.
C: Doping, SEM sample preparation. From rod.
Au, Ag: Metalising, contacting. From crucible.
Cu: Surface science. From crucible.
Nb: From rod.

Product Description:
The SPECS EBE-4 is a combined multipocket mini e-beam evaporator which is capable of evaporating small quantities of almost any material. The material either in rod form or in a crucible is heated by electron bombardment from the surrounding filament allowing temperatures in excess of 3000K to be reached. Up to 4 pockets can be fitted with a linear drive or fixed length holder or can be upgraded by the user later on if required. Furthermore, all pockets may be used individually or in any combination for true co-evaporation from crucible or in rod form with up to 25 mm rod feed when the pocket is fitted with a linear drive. The instrument is therefore highly flexible and is well suited to a wide range of surface science applications.