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   Your location > Systems > Stand-alone Systems > INA-X (SNMS/SIMS)

Performance Data INA-X

1. Sensitivity SNMS-Mode

1.1. Bulk analysis - DBM

Sample: NIST standard material AISI 4340 or AISI 94B17
Steel (NBS 1261a or NBS 1262b)
Sensitivity: over 20 000 cps for 1000 ppm Mo
Trace sensitivity: over 60 cps for 5.2 ppm Ce
Background: <10 cps averaged from 10 scans with a scan speed of
2 s/amu in mass range from 132 to 136 amu
Bombarding Ar+ energy: 1.8 ... 2 keV
Aperture: 8 mm diameter
Procedure: isotopes are summed up

1.2. Bulk analysis - HFM

Sample: BaTiO3
Sensitivity: over 200 000 cps Ti (48) and Ba (138) with
800 V/500 kHz square wave voltage and frequency (duty cycle 1:9)

2. Quantification

2.1. Calibration

Sample: SPECS Stainless Steel Quantification Standard
Conditions: DBM 1 keV, aperture 8 mm diameter
Relative sensitivity factors: Sensitivity factors relative to Fe are determined for
Si, Ti, Cr, Co, Nb, Sn, Al, P, V, Mn, Ni, Cu, Mo by averaging 10 spectra taken with 1 s/amu each.
Averaged spectrum is converted into bar spectrum.

2.2. Bulk analysis

Sample: NIST standard material AISI 4340 or AISI 94B17
Steel (NBS 1261a or NBS 1262b)

Conditions: as 2.1.

Procedure: Averaging 10 spectra taken with a scan speed of 1 amu/s and converted in bar spectra.
Reproducibility: For the minimum of 5 of the elements x specified under 2.1, the standard deviation of the intensity
Ratio Ix/Ife is less than 6 %.
* Quantification: Applying sensitivity factors determined above, the deviation of the determined value from the specified NBS value is less than +- 10 % for in minimum 5 of the elements specified under 2.1


3. Vacuum system

3.1. Analysis chamber: 5 10-9 mbar after bake-out
3.2. Preparation chamber: 1 10-7 mbar over night, 1 10-5 mbar (ready for transfer) 5 min after the loading of 5 non outgassing samples
3.3. Bake out Tmax = 150 C, min. 10 hours
3.4. Operating Conditions 5 x 10-4 -2 x 10-3 mbar range Ar or Kr


4. SIMS Mode

4.1 Sensitivity

60.000 cps/nA at 5 keV for 98Mo isotope of an oxidized molybdenum sample

 




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